Symposium L
NEMS/MEMS Technology and Devices

Symposium Topics

  • Theory, Design, Analysis of MEMS and NEMS
  • Materials and Device Characterization
  • Fabrication Technologies
  • Packaging and Assembly Technology
  • Mechanical and Physical Sensors
  • Chemical Sensors and Microsystems
  • BioMEMS and Fluidic Systems
  • Actuators and micro-structure modeling
  • Optical MEMS and nanophotonic (PBG, QD and plasmonics)
  • RF MEMS devices and switching circuits
  • Sensing System, Algorithm and Sensor Networks
  • Nanotechnology and NEMS Devices
  • Lab-on-a-chip and uTAS devices
  • Plasmonic MEMS and devices