Symposium H: MEMS Technology and Devices
Chairs
- LIU Ai-Qun, Nanyang Technological University, Singapore
- LU Chun, Institute of High Performance Computing, Singapore
Co-Chairs
- Ajay AGARWAL, Institute of Microelectronics, Singapore
- LIM Siak Piang, National University of Singapore, Singapore
- Poenar Daniel PUIU, Nanyang Technological University, Singapore
Correspondence
LIU Ai-Qun
School of Electrical & Electronic Engineering, Nanyang Technological University,
50 Nanyang Avenue, Singapore 639798
Tel: (65) 67904336, Fax: (65) 67920415
Email:
Overview
The emphasis of this symposium is on Microelectromechanical Systems (MEMS) technology and devices. Particularly applications that involve MEMS design, modeling, fabrication processes (e.g. semiconductors, polymers, etc.) lab-on-a-chip, and biophotonic medical devices (e.g. DNA, protein and cell sorting, etc.) are preferred. This symposium will explore new devices and processes innovation and engineering applications, especially related to MEMS technology and devices.
Topics
- Theory, Design, Analysis of MEMS and NEMS
- Materials and Device Characterization
- Fabrication Technologies
- Packaging and Assembly Technology
- Mechanical and Physical Sensors
- Chemical Sensors and Microsystems
- BioMEMS and Fluidic Systems
- Actuators and micro-structure modeling
- Optical MEMS and Nano-optics (PBG, QD)
- RF MEMS devices and circuits
- Sensing System, Algorithm and Sensor Networks
- Nano Devices and Nano Technology
Keynote Speakers
- FANG Qun, Zhejiang University, China
- HUANG Qing-An, Southeast University, China
- Ciprian ILIESCU, Institute of Bioengineering and Nanotechnology, Singapore
- Vincent LEE, National University of Singapore, Singapore
- Mary LI, NASA Goddard Space Flight Center, USA
- LI Hua, Nanayng Technological University, Singapore
- LIN Liwei, University of California Berkeley, USA
- Daniel Puiu POENAR, Nanayng Technological University, Singapore
- Balakumar SUBRAMANIAN, Institute of Microelectronics, Singapore
- Kitamori TAKEHIKO, The University of Tokyo, Japan
- XIA Shanhong, Institute of Electronics, Chinese Academy of Sciences, China
Invited Speakers
- GONG Haiqing, Nanayng Technological University, Singapore
Manuscript Publication
Submission Deadline: 1 May 2007
The manuscripts will be published in a proceedings by Pan Stanford Publishing.
The page limit of the summary paper is four (04) pages for both oral and poster presentations.
Please follow the template posted here to prepare the manuscript and send it by email to Prof Lu Chun at: and Dr. Reddy at:
(Subject title: ICMAT Sym H Manuscript Submission)
